Veröffentlichungen und Vorträge aus der SMT-Welt

Autoren: Eelco van Setten, Jan Van Schoot, Anton van Oosten, Claire van Lare, Friso Wittebrood, Gijsbert Rispens, Gerardo Bottiglieri, John McNamara, Natalia Davydova, Jo Finders, Joerg Zimmermann, Bartosz Bilski, Paul Graeupner

Citation: Proc. SPIE 11854, International Conference on Extreme Ultraviolet Lithography 2021, 118540G (28 September 2021), DOI: https://doi.org/10.1117/12.2600965

Autoren: Paul Graeupner, Peter Kuerz, Jan Van Schoot, Judon Stoeldraijer

Citation: Proc. SPIE 11854, International Conference on Extreme Ultraviolet Lithography 2021, 118540F (28 September 2021), DOI: https://doi.org/10.1117/12.2600962

Autoren: Lars Wischmeier, Paul Graeupner, Peter Kuerz, Judon Stoeldraijer, Jan van Schoot

Citation: 2021 EUVL Workshop Proceedings, P52 (June 5-10, 2021)

Autoren: Laurens de Winter, Timur Tudorovskiy, Jan van Schoot, Kars Troost, Erwin Stinstra, Stephen Hsu, Toralf Gruner, Juergen Mueller, Ruediger Mack, Bartosz Bilski, Joerg Zimmermann, Paul Graeupner

Citation: Proc. SPIE 11517, Extreme Ultraviolet Lithography 2020, 1151715 (18 November 2020), DOI: https://doi.org/10.1117/12.2572878

Autoren: Michael Busshardt, Dirk Juergens, Paul Graeupner

Citation: 2020 EUVL Workshop Proceedings, P21 (June 7-11, 2020)

Autoren: Thilo Pollak, Wolfgang Emer, Bernd Thüring, Francis Fahrni, Friso Klinkhamer, Wim de Boeij, Wim Bouman

Citation: Proc. SPIE 11327, Optical Microlithography XXXIII, 113270T (23 March 2020), DOI: https://doi.org/10.1117/12.2552063

Autoren: Lars Wischmeier, Paul Graeupner, Peter Kuerz, Winfried Kaiser, Jan van Schoot, Joerg Mallmann, Joost de Pee, Judon Stoeldraijer

Citation: Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI, 1132308 (23 March 2020), DOI: https://doi.org/10.1117/12.2543308

Autoren: Bartosz Bilski, Jörg Zimmermann, Matthias Roesch, Jack Liddle, Eelco van Setten, Gerardo Bottiglieri, Jan van Schoot

Citation: Proc. SPIE 11177, 35th European Mask and Lithography Conference (EMLC 2019), 111770I (29 August 2019), DOI: https://doi.org/10.1117/12.2536329