AIMS™ & MeRiT®

Ideal solution for mask defect analysis, repair and repair verification

Critical defects identified by AIMS™ can be repaired precisely with the MeRiT® system based on e-beam technology. The MeRiT® HR 32 repairs opaque and clear defects with unprecedented precision and stability. After the repair process the AIMS™ is the industry’s solution to validate the quality of the repair.