PROVE® Compact & RegC®

Measure and improve mask registration

After completing the mask manufacturing process the mask is measured on the PROVE® tool resulting in a pre RegC® error map. RegC® loads the map and calculates a registration correction job. After running the process that mask will be measured again with the PROVE® tool to verify the result.

Applying the described closed loop solution prevents mask makers from rewriting a mask with registration errors. This significantly saves valuable mask writing time and costs in the manufacturing process. It shortens the turnaround time for photomasks in mask shops and enables to achieve tightest registration specifications. Moreover the process flow will not be interrupted.